In this work we have studied the direct detection and spectrometric capabilities for internal conversion electrons of an ion-implanted diode, developed in the framework of R&D programs at CERN, envisaging its use in an electron-gamma coincidence system for nuclear parameters measurements. The best energy resolution obtained until now, 12.6 keV (FWHM) for the 133Ba 320.32 keV electron emission, is sufficiently good to justify the use of this diode for spectrometry of low energy electrons.